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GuardianPro-C

GuardianPro-C Reticle Storage and Inspection System

The GuardianPro-C^™ is a fully automated, highly flexible standalone storage and inspection system for 6" reticles based on a modular, cartesian platform. The flexibility offered in size, features, and functionality makes it ideal for a variety of applications in new or existing production facilities. The GuardianPro-C system supports reticle storage, retrieval, and transfer between a variety of reticle carrier types as well as inspection capabilities. The GuardianPro-C optimizes reticle logistics and scanner/stepper utilization and reduces manual reticle handling.

The flexible GuardianPro-C system can support industry-standard cassette and pod types, such as shipping boxes, Canon, Nikon, and RSP/MSRP.

The flexibility offered in size, features, and functionality makes the GuardianPro-C ideal for a variety of applications in new or existing production facilities.

Key Benefits:

Increased scanner/litho cell uptime
Reduced scanner idle time; defined reticle arrives safe, on time, correctly oriented, and clean with controlled quality
Reduced reticle rework costs
Reticle protection from chemical contamination, haze, and crystal growth
Extended reticle lifetime results in an increased number of exposures
Increased number of possible exposures results in a high wafer in process (WIP) cycle time
Quality control, certifiable solution
Fully automated reticle handling defined inspection procedures
Reliable, safe handling for prevention of reticle and pellicle damage as well as human mistakes
Low cost of ownership (COO)
Low purge gas consumption
Versatility in size and options