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GuardianPro-S

GuardianPro-S Bare Reticle Stocker Family

The GuardianPro-S^™ family provides a fully automated reticle management system with a stocker capacity of up to 2900 reticles on a minimal footprint. The reticles are safely stored in Tec-Cell^® modules, ensuring an ISO class 1 microenvironment with xCDA purge.

The GuardianPro-S family supports a variety of different reticle cassettes including SMIF multi-pods (MRSP), SMIF mono-pods (RSP) as well as Nikon and Canon reticle cassette.

The GuardianPro-S family provides a fully automated reticle management system with a stocker capacity of up to 2900 reticles on a minimal footprint.

Key Benefits:

Automated reticle management and traceability
Increased scanner/litho cell uptime
Reduced reticle rework costs
Reticle protection from chemical contamination, haze, and crystal growth
Increased number of exposures result in an extended reticle lifetime
Fully automated reticle handling
Reliable, safe handling for reduced reticle and pellicle damage
Low cost of ownership (COO)
Low purge gas consumption
Highest storage density available in the market