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GuardianPro-X

GuardianPro-X Reticle Stocker and Pod Buffer

The GuardianPro-X^™ family is an innovative combination of reticle stocker and carrier buffer for managing the reticles throughout the fab. This fully automated reticle management system stores up to 2496 reticles and 68 pods on the smallest footprint.

The reticles are safely stored in patented Tec-Cell^® modules, providing a purged ISO Class 1 micro-environment.

The system can be configured to accommodate common RSP150 and MRSP150 reticle carriers. Optional OHT load ports enable the system to be integrated with fully automated litho bays

This fully automated reticle management system combines a reticle stocker and a pod stocker for up to 2496 reticles and 68 pods on the smallest footprint.

Key Benefits:

Improved access times due to fast access buffer
Simultaneous access by operators and AMHS with independent manual and OHT load-ports
Automated reticle management and traceability
Increased scanner/litho cell uptime
Reduced reticle rework costs
Reticle protection from chemical contamination, haze, and crystal growth
Increased number of exposures for an extended reticle lifetime
Highest storage density
Fully automated reticle handling
Reliable, safe handling for reduced reticle and pellicle damage
Low cost of ownership (COO)
Low purge gas consumption