Brooks is the leading provider of automated RFID and Infrared (SMART-Tag™) carrier ID tracking systems for semiconductor fabs and equipment companies. The RFID product line includes a comprehensive suite of low- and high-frequency RFID products and display tags for FOUP, FOSB, 200mm SMIF-Pod, and cassette tracking. These tracking technologies allow fabs to identify the material in process and prevent costly misprocessing of wafers by validating the material at each process and metrology step.
Asset Tracking and RFID Solutions
- ATR60LF Reader
- LF80 ZeniD Reader
- LF40C THR RFID Reader
- LF Antennas
- HF80C Mid Range Systems
- HF40 THR RFID Reader
- HF Antennas